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紧凑、高性能
电磁驱动二维激光扫描 MEMS 振镜
S13989-01H
S13989-01H 是采用滨松独特的 MEMS*1 技术生产的电磁驱动 MEMS 振镜。双轴操作（X 轴和 Y 轴操作）实现使用激光等的反射进行二维扫描（光栅扫描）*2。
通常，电磁振镜具有磁铁围绕振镜芯片放置的构造。但是，我们的 MEMS 振镜在振镜芯片下面放置了紧凑型强磁铁。它们虽然小巧，却能实现宽光偏转角（快轴：±20°，慢轴：±12°）。
它们还具有高可靠性、气密密封封装、低电压驱动和线性操作*3的特点，允许任意设置光偏转角。
它们可以应用于各种扫描装置，以获得 2D 或 3D 信息。部分用途包括使用机器视觉进行形状识别、激光测距、用于自动导引车辆等的障碍物检测，以及激光扫描显微镜。
*1：微机电系统
*2：一种构成二维图像的扫描方法。首先，通过一维扫描获得一条线，然后沿垂直方向扫描该线以构成图像。
*3：慢轴
解说视频
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主要特点
1) 尺寸紧凑，但光偏转角度大
2) 低电压驱动（非常安全，适合安装在各种设备中）
3) 高可靠性：密封封装
4) 可以线性操作（可以任意设置光偏转角）
应用示例
1) 机器视觉
2) 激光测距
3) 激光显微镜
阵容
除了用于一维扫描的 MEMS 振镜之外，用于二维扫描的振镜也已添加到阵容中。选择适合您用途的产品。
| 型号 | S12237-03P | 新 S13989-01H |
|---|---|---|
| 照片 |  |
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| 类型 | 用于一维扫描 | 用于二维扫描 |
| 扫描模式 | 单轴线性扫描 | 双轴光栅扫描 |
| 操作模式 | 线性模式 | 快轴：非线性模式（谐振模式） 慢轴：线性模式 |
| 振镜尺寸 | φ2.6 mm | φ1.23 mm |
| 振镜材料 | 铝 | 铝 |
| 光偏转角 | ±15° | 快轴：±20° 慢轴：±12° |
| 驱动频率 | 最大 100 Hz | 快轴：典型值为 29.3 kHz 慢轴：最大 100 Hz |
| 建议工作温度 | -20 至 +70 °C | -20 至 +60 °C |
相关材料
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