真空静电消除器是使用“光离子化”来应用真空紫外光去除静电的静电电荷去除器。这种创新的离子化方法利用真空紫外光的独特功能来消除真空(减压状态)中不需要的静电电荷,这是此前一直无法实现的。
真空静电消除器是使用“光离子化”来应用真空紫外光去除静电的静电电荷去除器。这种创新的离子化方法利用真空紫外光的独特功能来消除真空(减压状态)中不需要的静电电荷,这是此前一直无法实现的。
波长小于 160 nm 的高能真空紫外光可确保高效去除静电电荷,从而消除生产线和各种制造工艺中发生的各种类型的静电问题。
将真空紫外光照射到真空(减压状态)中的残余原子和分子上,会从原子和分子中射出电子,留下带正电荷的原子和分子(阳离子)。这些射出的电子随后与其他残余原子和分子组合以产生阴离子。这些电子和离子在受到真空紫外光照射的整个空间中同时产生,在目标物体附近产生的电子和离子会被静电吸引,从而去除目标物体上的静电电荷。在此工艺期间产生的其它电子和离子返回到其原始残余原子和分子。
由于其静电电荷去除原理,传统的电晕放电静电消除器不可能在真空(减压状态)中去除静电电荷。
真空静电消除器有一个真空法兰,可连接到真空室并发射真空紫外光,以在真空(减压状态)下实现残余原子和分子的离子化。这允许在低真空和高真空条件下可靠且有效地去除静电电荷。
在真空紫外光照射的整个空间内不断产生离子,形成高离子密度,通过将目标物体上的所有静电电荷中和至 0 伏,有效去除目标物体上的所有静电电荷。
固有的平衡离子化可确保产生等量的阳离子和阴离子,并且不会导致可能以相反极性对目标物体充电的“过冲”。因此,根本不需要调整阳离子和阴离子的供应情况。
过冲是由于产生数量不平衡的阳离子和阴离子、而使目标物体带上相反极性的静电电荷的现象。
电子和离子也在目标物体附近产生并被目标物体上的静电有效吸引,从而直接去除静电电荷。这意味着不再需要通过吹气将产生的电子和离子移动到目标物体上。不使用这种气流可防止排放任何可能对目标物体造成严重影响的扬尘粒子。
请查看其他数据,了解照射真空紫外光对于目标对象有何影响。
光离子化或离子化是去除静电电荷的清洁工艺,因为它不会产生粉尘离子或电磁噪声。这种设计消除了普通静电消除器因粉尘粒子引起的产品缺陷,以及可能由电磁噪声引起的外围设备故障等潜在问题。
真空静电消除器采用我们完全自主制造的高质量、高精度氘灯。这种氘灯具有高稳定性和长寿命,可确保长期稳定地发射真空紫外光。
真空静电消除器可确保在从低真空度到高真空度的各种真空条件下高效去除静电电荷。真空静电消除器还可用于去除惰性气体环境等特殊环境中的静电电荷。
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