X15213 系列具有高光利用率,该效率定义为 0 阶衍射光强与输入光强的比率。光利用率主要取决于振镜反射率,以及像素结构造成的衍射损耗量。我们采用先进的 CMOS 技术来减少衍射损耗。因此,衍射损耗小于 5%。特别是 -02/-03/-05/-12/-13/-15/-16/-19 类型,由于具有高反射率的介质镜,具有极高光利用率。
X15213 系列可在 400nm 至 2050 nm 读出波长范围内实现超过 2 π 弧度的相位调制。各种类型在发运之前都会在工厂进行预校准,以获得特定波长范围内的高精度和高线性调制特性。图 5 显示了典型的相位调制特性。实现 2π 弧度或更大的相移和线性相位响应。有效面积中 95% 像素的相位调制曲线都在 +/- 2 σ 范围内,表明变化很小。
X15213 系列是一种纯相 SLM,具有高精度相位控制;因此,它具有接近理论值的高衍射效率。图 2 显示了在 X15213 系列中出现多级相位光栅时衍射点的图像,图 3 显示了典型的衍射效率特性。这里,衍射效率定义为 I1/I0,其中,I1 是一阶衍射点的强度,I0 是无图案显示时 0 阶光的强度。
X15213 系列具有高精度相位控制和高衍射效率,非常适合用于全息用途。
图 4 (a) 是具有平整度校准的输出波前的干涉仪图片。
图 4 (b) 中的图像被重建为通过傅里叶变换光学元件的相位全息图的 1 阶衍射。图 4 (c) 展示了清晰的 (0, 1) 阶拉盖尔高斯 (LG) 光束。
LCOS-SLM 包括以下专利许可。请联系我们了解其他专利。
JP4420672、 JP4664031、 JP4947639、 JP4551363、 JP4606831、 JP5046331、
JP5167274、 JP5270142、 JP5779359、 JP5779360、 JP5809420
US7209279、 US7527201、 US7876405、 US8576206、 US8749463、 US9007286、 US9223159、
US9250458、 US9250459
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