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专利信息 | 隐形切割™ 技术
Stealth Dicing（隐形切割）技术是一种使用激光的激光切割技术，具有全新的概念。由于“完全干燥工艺”、“无截口损失”、“无切屑”、“高弯曲强度”等特点，该技术适用的器件范围将扩大到包括 MEMS 器件和存储器件等。
SDBG（研磨前隐形切割）工艺可提供高通量切割，以生产具有高弯曲强度的超薄设备。
SDBG（研磨前隐形切割）是我们提供的晶圆切割工艺，以提高厚度小于 50 µm 的超薄芯片设备的结构强度。在 SDBG 工艺中，首先会使用激光光束照射晶圆，以便在晶圆内部形成改性层（隐形切割层或 SD 层）和裂纹，然后通过研磨和抛光使晶圆变薄。由于也会通过研磨和抛光而去除 SD 层，因此可以消除会降低芯片设备结构强度的潜在有害因素，以便能制造具有高质量和高强度的超薄芯片。
SDBG 工艺也非常适用于具有 DAF（芯片贴装薄膜）的晶圆，以及具有堆叠图案（包括低 k（低介电常数）薄膜）的硅晶圆。
处理流程示例
2. 激光辐射
SD 层处于 BHC (*4) 状态。
3. 研磨和抛光
也可通过研磨和抛光去除 SD 层。
5. 扩展
DAF (*3) 也在扩展过程中遭到分割。
（无需进行 DAF(*3) 处理。）
注意：流程可能因设备而异。
为了提高 SDBG 工艺的实用性与有用性，隐形切割技术采用了称为 LBA（激光光束调节器）的光学系统，该系统专为使用我们内部开发的 LCOS-SLM（硅基液晶 - 空间光调制器）进行隐形切割而设计。LCOS-SLM 是反射型空间光调制器，可以自由调制光的相位，并在其液晶表面上显示所需的任何图案，从而能根据用户用途实现高质量、高通量的激光处理。
激光光束会由扩束器扩展到最佳形状，并照射在显示所需任何图案的 LCOS-SLM 上。接下来，激光光束由 LCOS-SLM 内的压控液晶进行相位调制，并通过图像传输光学系统，从中将波前形状的图像传输到物镜表面。然后光束将通过物镜，聚焦在晶圆内部。
LBA 可以校正聚焦在晶圆内部的激光光束，或将其分割成多个激光光束，以获得最佳的激光切割效果。例如，像差校正能改善光束聚焦性能，这会扩展源自 SD 层的裂纹，从而减少所需 SD 层的数量。通过多点同步处理，可以将物镜发射的激光光束分割成多个光束，从而沿晶圆厚度方向同时形成多个 SD 激光光束。可以对分割后的每个激光光束进行控制，以便进行像差校正，并根据切割深度对激光输出比进行调整。在需要时，也可以将激光光束在激光光束扫描方向分割成多个光束，以便能使用低频激光进行高速处理，或能提高同步处理期间的切割质量。
主光学系统布置示例
激光光束聚焦图和剖面图照片
提供像差校正
不提供像差校正
提供多点同步处理
（红色：SD 层/白色：裂纹）
不提供多点同步处理
（红色：SD 层/白色：裂纹）
注意：激光光束聚焦图是图像。
我们的推动 SDBG 工艺的专利
隐形切割技术开发于大约 20 年前。从那时起，凭借激光器和光学系统的持续改进，隐形切割技术的用途得以扩展，已经涵盖各种设备与材料。最近，存储设备的大规模生产已经开始使用 SDBG 工艺，这是隐形切割技术最初的开发目标。
使用我们先进的隐形切割技术时，请注意，还应预先查看增值处理的许多专利。下表展示了我们目前持有的 SDBG 工艺专利，以及专为隐形切割而设计的相关 LBA 光学系统的专利。
| 国家/地区 | SDBG 工艺 （研磨前隐形切割） 专利号 |
隐形切割专用光学系统 LBA（激光光束调节器） 专利号 |
|---|---|---|
| 日本 | 4995256，4358762，3762409，4781661，4563097 | 5863891，6258787，5575200，5255109，5479925， 5148575，5692969，5599563，4402708，5775265， 5844089 |
| 美国 | 8268704，7566635，8304325，8314013，8518800， 8518801，8519511，8889525，9142458，9287177， 9711405，9553023，9548246，9543207，9543256， 10068801，10622255，7939430，8058103，8551817 |
8134099，9428413，10622254，10328521，8755107， 8526091，9415461，9488831，10324285，8610993， 8441709，9001411 |
| 韩国 | 10-0715576，10-0848408，10-1283294，10-0827879 | 10-1013286，10-1212936，10-1302336，10-1402475， 10-1711247，10-1564523，10-1711311，10-2303178， 10-1839439，10-1708066，10-1708161，10-1605219， 10-1577096 |
| 中国 | ZL03805866.9，ZL200510085444.0， ZL200610164347.5，ZL200610164346.0， ZL200710182348.7，ZL200580038895.7， ZL200480026066.2 |
ZL200880101826.X，ZL201010525444.9， ZL201210046724.0，ZL201410002145.5， ZL201580028164.8，ZL201180007586.9， ZL200980134183.3，ZL201410406348.0， ZL200980152729.8，ZL200980152900.5 |
| 台湾 | I278027，I363665，I321828 | I394627，I573649，I595953，I638697，I515065， I524958 |
| 德国 | 60339137.0，60337873.0，60313900.0，60350530.9， 60350449.3，60352263.7，602005045636.8， 602004031963.5 |
602008044635.2，602009051537.3，602009041607.3， 602009041757.6 |
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