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激光驱动光源 (LDLS)
EQ-77-QZ-S
EQ-77-QZ-S 是一款高输出功率 LDLS，产生的辐射照度比标准型号的 EQ-99X LDLS 高约 3 倍。为了保持其高输出功率，灯头需要氮气吹扫并连接到水冷机组。
特点
- Extremely broad wavelength range：170 nm to 2500 nm
- Long lifetime：10 000 hours
- High radiance from a small plasma
光谱辐射照度
详细参数
| Parameter | Description / Value | Unit | ||
|---|---|---|---|---|
| Optical interface*1 | Diverging beam (Single beam) | － | ||
| Wavelength range | 170 to 2500 | nm | ||
| Plasma size (FWHM) | Typ. | 125 × 320 | μm | |
| Numerical aperture | NA | 0.5 | － | |
| Lifetime*2 | Typ. | 10 000 | h | |
| Warm-up time | 30 | min | ||
| Laser class | Class 1 | － | ||
| Spectral radiance(at 500 nm) | Typ. | 75 | mW/mm2·sr·nm | |
| Broadband optical power | Typ. | 2.75 | W | |
| Output window size | Φ22 | mm | ||
| Window material*3 | Quartz | － | ||
| Cooling method | Water cooling*4*5 | － | ||
| Nitrogen purge | Required. Grade 4.8 or higher, filtered to 5 μm. 20 psiG ±2 psiG | － | ||
| Applicable standards | EN 61010-1 EN 61326-1 IEC 60825-1 IEC 62471 EN 50581 |
－ | ||
| Device configuration | Lamphead, Power supply controller, Remote control, Necessary cables | － | ||
| Power rating | Input voltage (AC) | 100 to 240 | V | |
| Power frequency | 50 / 60 | Hz | ||
| Power consumption | 350 | W | ||
*1 Dual-beam output mode can be selected as an option. See page 4 for detailed information.
*2 Windows may need to be replaced depending on the extent of contamination and usage conditions.
*3 YAG (190 nm to 2500 nm) and BK7 (350 nm to 2500 nm) windows are also selectable as options.
*4 Cooling water conditions Lamphead: ≥0.5 L/min, 18 °C to 30 °C, 100 psiG (0.69 MPa) max. inlet pressure Controller: No cooling required
*5 A chiller kit is available as an option.
外形尺寸图（单位：mm）
Lamphead
Controller
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