LCOS-SLM 具有高光利用率,该效率表示为 0 阶衍射光强与入射光强的比率。光利用率主要取决于 CMOS 芯片上形成的像素结构和振镜反射率造成的衍射损耗量。通过利用我们先进的 CMOS 技术,同时密切关注其设计,我们已将衍射损耗量降到 5% 以下。特定波长类型的介电多层薄膜形成在像素电极上,充当具有增强反射率的振镜。这减少了 LCOS 芯片内部的光吸收,实现了非常高的光利用率。
类型编号 |
宽波长带类型 |
|||||
|---|---|---|---|---|---|---|
-02L/-02R |
-03BL/-03BR |
-12L/-12R |
-15L/-15R |
-16L/-16R |
-19L/-19R |
|
光源波长 (nm) |
785 |
1064 |
940 |
1550 |
532 |
1950 |
光利用率 (%) |
97 |
97 |
97 |
97 |
97 |
97 |
我们的 LCOS-SLM 在支持的波长范围内提供超过 2π 弧度的相位调制。各种类型在发运之前都会进行校准,以确保特定波长范围内的高精度和高线性调制特性。图 1 显示了典型的相位调制特性。可以看出,2π 弧度或以上的相位调制是通过高线性获得的。我们还确认,有效区域内 95% 像素的相位调制在 ±2σ 以内,仅指示微小变化。
为最大限度地减少光损耗量,我们的 LCOS-SLM 优化了光学设计,故可提供接近理论值的高衍射率。图 2 为显示多级相位光栅时获得的衍射点图像。例如图 2 (c) 所示,多级相位光栅使仅按 +1 阶集中衍射点成为可能,从而实现高光利用率。图 3 还显示了典型的衍射效率。这里的衍射效率是不执行调制时(无图案显示)1 阶衍射光强与 0 阶光强的比率。
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