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特性 | 宽波长带类型
高光利用率
LCOS-SLM 具有高光利用率，该效率表示为 0 阶衍射光强与入射光强的比率。光利用率主要取决于 CMOS 芯片上形成的像素结构和振镜反射率造成的衍射损耗量。通过利用我们先进的 CMOS 技术，同时密切关注其设计，我们已将衍射损耗量降到 5% 以下。宽波长带类型采用铝振镜，故其反射率略低于使用介电多层薄膜振镜的其他类型，但可在广泛的波长范围内使用。
类型编号 |
宽波长带类型 | ||
|---|---|---|---|
| -01 | -07 | -08 | |
| 光源波长 (nm) | 633 | 1064 | 1550 |
| 光利用率 (%) | 76 | 80 | 86 |
大相位调制特性和高线性
我们的 LCOS-SLM 在支持的波长范围内提供超过 2π 弧度的相位调制。各种类型在发运之前都会进行校准，以确保特定波长范围内的高精度和高线性调制特性。图 1 显示了典型的相位调制特性。可以看出，2π 弧度或以上的相位调制是通过高线性获得的。我们还确认，有效区域内 95% 像素的相位调制在 ±2σ 以内，仅指示微小变化。
图 1：相位调制特性（代表性例子）
高衍射效率
为最大限度地减少光损耗量，我们的 LCOS-SLM 优化了光学设计，故可提供接近理论值的高衍射率。图 2 为显示多级相位光栅时获得的衍射点图像。例如图 2 (c) 所示，多级相位光栅使仅按 +1 阶集中衍射点成为可能，从而实现高光利用率。图 3 还显示了典型的衍射效率。这里的衍射效率是不执行调制时（无图案显示）1 阶衍射光强与 0 阶光强的比率。
图 2：衍射点图像
图 3：衍射效率（代表性例子）
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