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Optical MicroGauge 膜厚测量系统
C11011-22
Optical MicroGauge 膜厚测量系统 C11011 是一种利用激光干涉法的薄膜膜厚测量系统。可在 60 Hz 时进行高速测量，因此也可用于工厂内的线阵测量。与可选的映射系统结合使用，以便进行原型厚度分布测量。它可用于从监控制造过程到质量控制的各种用途。
C11011-22 可测量 25 μm 至 2.2 mm 以及 10 μm 至 0.9 mm 的玻璃。（可测量层数：最多 10 层）
| 型号 | C11011-22 |
|---|---|
| 可测量的薄膜厚度范围（玻璃） | 25 μm 至 2.2 mm*1 |
| 可测量的薄膜厚度范围（硅） | 10 μm 至 0.9 mm*2 |
| 测量重现性（硅） | 100 nm*3 |
| 测量精度（硅） | < 500 μm: ±0.5 μm, > 500 μm：±0.1%*3 |
| 光源 | 红外 LD （1300 nm) |
| 光斑尺寸 | 约 Φ60 μm*4 |
| 工作距离 | 155 mm*4 |
| 可测量层数 | 最多 10 层 |
| 分析 | 峰值检测 |
| 测量时间 | 16.7 ms/point*5 |
| 外部控制功能 | RS-232C，以太网 |
| 接口 | USB 2.0（主机 - 计算机） |
| 电源 | AC100 V 至 AC240 V，50 Hz/60 Hz |
| 功耗 | 约 50 VA |
*1：玻璃折射率当量。
*2：硅折射率当量。
*3：测量硅时的标准偏差
*4：提供工作距离为 1000 mm 的可选型号。
*5：最短曝光时间。
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