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Optical NanoGauge 膜厚测量系统
C12562-04
Optical NanoGauge 膜厚测量系统 C12562 是一款紧凑、节省空间的非接触式薄膜膜厚测量系统，可根据需要轻松安装在设备中。在半导体行业，因为硅穿孔技术的流行，硅厚度的测量至关重要；在薄膜生产行业，粘合层薄膜越来越薄，以满足产品规格。因此，这些行业现在需要更高的厚度测量精度，测量范围从 1 μm 到 300 μm。C12562 允许在 500 nm 至 300 μm 的宽厚度范围内进行精确测量，包括薄膜涂层和薄膜基板厚度以及总厚度。C12562 还提供高达 100 Hz 的快速测量，是高速生产线测量的理想选择。
| 型号 | C12562-04 |
|---|---|
| 可测量的薄膜厚度范围（玻璃） | 500 nm 至 300 μm*1 |
| 测量重现性（玻璃） | 0.02 nm*2 *3 |
| 测量精度（玻璃） | ±0.4%*3 *4 |
| 光源 | 卤素光源 |
| 光斑尺寸 | 约 φ1 mm*3 |
| 工作距离 | 10 mm*3 |
| 可测量层数 | 最多 10 层 |
| 分析 | FFT 分析、拟合分析、光学常数分析 |
| 测量时间 | 3 ms/point*5 |
| 光纤连接器形状 | FC |
| 外部控制功能 | RS-232C，以太网 |
| 电源 | AC100 V 至 AC240 V，50 Hz/60 Hz |
| 功耗 | 约 80 VA |
*2 测量 1 μm 厚玻璃膜时的标准偏差（容差）。
*3 取决于使用的光学系统或物镜放大率。
*4 VLSI 标准测量保证文件中记录的测量保证范围。
*5 最短曝光时间。
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