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Optical NanoGauge 膜厚测量系统
C15151-01
Optical NanoGauge 膜厚测量系统 C15151-01 是一种利用光谱干涉法的非接触式膜厚测量系统。这种大功率、高度稳定的白光源支持精确测量薄膜厚度，即使是超薄薄膜也是如此。此外，光源的使用寿命为 10,000 小时，适用于在线操作。
| 产品编号 | C15151-01 |
|---|---|
| 测量薄膜厚度范围 | 玻璃*1：1 nm 至 20 μm 硅*2：0.43 nm*3 至 8.6 μm |
| 测量可再现性 | 玻璃 *4*5：0.1 nm 硅*6：1 nm |
| 测量精度*5 *7 | ±0.4% |
| 光源 | 大功率白光源 |
| 测量波长范围 | 200 nm 至 790 nm |
| 光斑尺寸*5 | 约 Φ1 毫米 |
| 工作距离 *5 | 10 mm 起 |
| 可测量层数 | 最多 10 层 |
| 分析 | FFT 分析、拟合分析、光学常数分析 |
| 最短的节拍时间 | < 2 ms/point |
| 外部通信接口 | RS-232C，以太网 |
| 输出信号 | 模拟输出：0 V 至 10 V/高阻抗 3 通道（最多 3 层） 警报输出：TTL/高阻抗单通道 警告输出：TTL/高阻抗单通道 |
| 输入信号 | 测量开始信号：TTL/高阻抗单通道 |
| 电源电压 | AC100 V 至 AC240 V，50 Hz/60 Hz |
| 功耗 | 约 130 VA |
| 光导连接器形状 | FC |
*1 当以玻璃折射率 1.5 进行转换时。
*2 当以玻璃折射率 3.67 进行转换时。
*3 这是转换为硅折射率的计算值 (3.67)。
*4 测量 2 nm 厚玻璃薄膜时的标准偏差（公差）。
*5 取决于使用的光学系统或物镜放大率。
*6 测量 30 μm 厚标准具时的标准偏差（容差）。
*7 VLSI 标准测量保证文件中记录的测量保证范围。
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