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Stealth Dicing™（隐形切割）技术
Stealth Dicing（隐形切割）技术是一种使用激光的激光切割技术，具有全新的概念。由于“完全干燥工艺”、“无截口损失”、“无切屑”、“高弯曲强度”等特点，该技术适用的器件范围将扩大到包括 MEMS 器件和存储器件等。
原理、特点和最新技术趋势的技术信息
目前正在接受文件申请
本文在梳理传统切割技术面临的问题后，介绍了隐形切割技术的原理、特点、最新技术趋势、工艺和环境贡献。请随意申请。
原理
隐形切割技术可将能够穿透材料的波长的激光光束聚焦，在内部聚焦并形成晶圆破裂的起点（改性层：隐形切割层，以下称为“SD 层”），然后向晶圆施加外部应力，将其分离。该过程主要由两部分组成，即形成 SD 层以使晶圆内部破裂的“激光辐照过程”以及用于分离晶圆的“膨胀过程”。
过程 1：激光辐照过程
激光光束聚焦在晶圆内部，形成 SD 层以分离晶圆。裂纹也从 SD 层形成，而 SD 层在内部朝向晶圆的顶部和底部表面形成，这些裂纹通过激光光束扫描沿着计划的切割线连接。此外，为了切割 MEMS 器件等厚晶圆，在厚度方向上形成多个 SD 层，然后连接裂纹。
必须根据用途使用 SD 层的四种模式；这些模式组合在一起，实现最佳处理条件。最佳处理条件是否存在取决于半导体器件的状态，如晶圆的厚度或芯片的形状，以及是否存在任何金属薄膜等。
激光辐照原理
硅晶圆内 SD 层的照片
SD 层的行为
ST：隐形
裂纹未到达顶部和底部表面
HC：半切割
裂纹已到达顶部表面
BHC：底侧半切割
裂纹已到达底部表面
FC：全切割
裂纹已到达顶部和底部表面
过程 2：膨胀过程
通过胶带膨胀等行为在周边方向上拉紧胶带，对已形成 SD 层的晶圆施加外力。这会对晶圆的内部裂纹状态施加拉应力，并使裂纹延伸到顶部和底部表面，从而分离晶片。
由于晶圆分离是通过延伸裂纹进行的，因此没有应力施加在器件上。此外，由于基本上没有截口损失，这会提高芯片成品率。
膨胀前
膨胀后
膨胀（裂纹延伸）原理
1. 胶带在周边方向上延伸
2. 拉应力使晶圆的内部裂纹状态延伸
3. 裂纹到达顶部表面并分离晶圆
下面显示了使用隐形切割技术切割的具有膜结构的 MEMS 器件以及具有保护薄膜和金属薄膜的器件的照片。这实现了锋利的切割质量，芯片的顶部和底部表面没有任何切屑。切割效果良好，没有任何损坏，也没有污染物附着到芯片中心的膜结构上。
器件照片
具有膜结构的 MEMS 器件
具有保护薄膜和金属薄膜的器件
特点
与传统技术的区别
隐形切割技术从基本原理上解决了刀片切割和烧蚀切割的问题。
刀片切割
金刚石砂轮高速转动，利用刀片切割技术切割晶圆，这会出现以下类型的问题。
○ 振动和冷却水造成应力负荷和再污染
○ 切屑导致强度下降
○ 分散物质导致脆弱结构断裂和污染
（增加保护膜的成型工序和去除工序）
○ 芯片成品率受限
○ 处理速度受限
烧蚀切割
烧蚀切割是一种使用激光的切割技术。激光光束聚焦在晶圆的顶部表面，在晶圆中蚀刻出凹槽，然后使用烧蚀切割技术将晶圆切割，这会出现以下类型的问题。
○ 由于所谓 HAZ（热影响区）的热效应而导致强度劣化
○ 分散物质导致脆弱结构断裂和污染
（增加保护膜的成型工序和去除工序）
○ 芯片成品率受限
○ 处理速度受限
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