真空静电消除器有助于防止静电破坏和粒子粘附,从而显著提高制造工艺的良率和产量。真空静电消除器不仅不会引起可能导致相反极性充电的“过冲”,还提供清洁的离子化工艺,无需将空气吹到目标上,并且不会产生电磁噪声。由于真空静电消除器能够发挥这种有效的离子化作用,正广泛应用于半导体、LCD 面板和有机 EL 显示器制造等众多领域和用途,消除静电和粉尘粒子粘附这两大难题。
半导体器件的小型化、工艺收缩和电路集成程度不断提高,使其更容易受到静电电荷的影响。因此,采取静电电荷消除措施来预防静电破坏以及异物粒子粘附导致的设备缺陷变得至关重要。
当用于静电卡盘时,真空静电消除器可消除拆卸卡盘时产生的静电电荷,使卡盘拆卸安全可靠。通过定时照射真空紫外光以消除晶圆,可以去除静电卡盘上的残留静电电荷,而不会对半导体器件造成紫外损坏。如需以几秒钟到几分钟的时间间隔执行开/关照射控制,我们建议使用快门来中断真空紫外光。
液晶和有机 EL 显示屏越来越大,却越来越薄,因此必须采取高效和有效的措施来消除较大表面区域的静电电荷。真空静电消除器有助于防止静电破坏和外来粒子粘附造成的产品缺陷,并提高制造工艺的良率和产量。
在处理大型玻璃基板的用途中,安装多个真空静电消除器将增强静电电荷去除效果。
硬盘必须提供更大的容量和更高的数据传输速度,因此有效的静电电荷预防措施变得空前重要。通过消除积聚在易受静电电荷影响的磁头和可能附着外来粒子的磁盘等组件上的静电,这将有效提高制造工艺的良率和产量。
反复接触物体并从物体上剥离的薄膜会产生静电。大的静电电荷尤其容易积聚在进料辊和收料辊附近的辊膜表面上。真空静电消除器可防止静电火花造成的薄膜损坏(穿孔)和粘附外来粒子造成的缺陷,并有助于改善工作环境条件。
在较宽薄膜的用途中,安装多个真空静电消除器将增强静电电荷去除效果。
在利用电子束的设备上,真空静电消除器可以消除使用电子束照射样品时产生的电荷。例如,在扫描电子显微镜(简称 SEM)用途中,精确去除样品上的电荷后可获得清晰的图像,这些电荷是由电子束照射样品引起的。
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