光,即可能性本身。滨松立足核心光子技术,以期助力世界光产业的开拓。然而仅凭滨松自己是无法做到的,需要与万千光之大道上的同行者们一起,探寻未知未涉。自改革开放初期,滨松即于新中国初代光学专家们建立起了深厚的友谊,如王大珩先生、母国光先生等等。对于推动我国光子基础及应用技术持续发展的一代又一代科研工作者们,滨松始终饱含敬意,并希望通过自身的力量,为其助力。为此,滨松中国计划广邀国内光技术、光应用相关的专家学者们,开办系列讲座——“滨松讲堂·青年学者科技论坛”,畅怀分享具有引领性、创新性的科研进展,以及热门的产研结合话题。希望通过建立广泛的影响,增加诸多高价值科研成果的呈现,或为产研联系创造交流平台。
“滨松讲堂·青年学者科技论坛”第一期,有幸邀请到了华中科技大学机械学院朱金龙教授,为我们带来分享。
讲座形式
在线直播(蔻享学术)
专家简介
朱金龙,华中科技大学机械学院教授。入选国家海外高层次青年人才、湖北省海外高层次人才、武汉市海外高层次人才、华为“东湖学者”等人才计划。主要研究方向为光电子纳米尺度探测技术与装备、光电集成器件的设计与制造技术、工业三维测量技术与装备。以第一作者、通讯作者在包括Nature Communications、Advanced Science、ACS Nano、Nano Letters、Nanoscale Advances、Advanced Photonics Research、Optics Letters等期刊和国际顶会上发表论文60余篇。已获美国、国内授权专利20余项。现任IJEM期刊编委、Frontiers in Physics期刊编委、《光学学报》编委、ICOIM国际光学与显微成像会议程序委员会共主席、ISMTII测量技术与智能仪器国际研讨会程序委员会共主席、中国仪器仪表学会集成电路测量技术与仪器分会秘书长、机械工程学会极端制造分会委员会委员、中国光学学会光学测试专业委员会委员、中国光学学会光电技术专业委员会委员、中国空间科学学会空间智能专委会青年委员等。
讲座摘要
随着亚10 nm集成电路芯片逐步进入消费电子、互联硬件、电子医疗设备等领域,由半导体制造设备所引入的晶圆缺陷对集成电路在良率与价格方面的影响将不断显现,由此带来的对典型缺陷进行高速识别、定位与分类等制造过程控制环节,将变得越来越具有挑战性。纳米光子学、计算成像、定量相位成像、光学涡旋、多电子束扫描、热场成像以及深度学习等新兴技术的出现,在提升缺陷灵敏度、分辨率以及对比度等方面已初步展现出一定的潜力,这为晶圆缺陷检测提供了新的可能性。
本报告将介绍报告人课题组近年来在新型光学相位成像领域的一些进展及其在集成电路图形化缺陷检测、微纳米三维形貌测量、纳米量级物理量表征等方面的运用。
讲座报名
报名页面:https://www.koushare.com/live/details/36421
扫码报名
咨询联系
如对讲座内容或活动本身有任何问题,欢迎联系
张聚方
159 0112 9491
下期预告
系列活动第二期,滨松中国邀请到了吉林大学电子科学与工程学院王磊副教授,带来激光加工相关应用研究的报告。活动将在8月底举行,敬请关注和期待。
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