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专为检测紫外光而设计 (λ=266 nm)
用于半导体检查设备的硅 APD "S14124-20"
S14124-20 是一款对 266 nm 紫外光具有高灵敏度的硅 APD。
在半导体制造工艺中，由于电路图案的工艺几何形状小型化，必须在晶圆上检测到的缺陷变得越来越小。
为了提高检测此类缺陷的精度，在光学半导体检查设备中使用对紫外光具有高灵敏度的短波长光源和探测器。
滨松的新产品 S14124-20 对于 266 nm 波长的光提供 87% 的高量子效率，这是用作半导体检查设备光源的 YAG 激光器的第四次谐波。
本产品可用作半导体检查设备、激光加工设备和光罩缺陷检查设备的探测器。
量子效率-波长
详细参数
| 参数 | 新 S14124-20 | 单位 |
|---|---|---|
| 受光面 | φ 2.0 | mm |
| 封装 | TO-8 | - |
| 击穿电压 | 400 | V |
| 量子效率 (λ=266 nm) | 87 | % |
| 暗电流 | 最大值 10 | nA |
| 截止频率 | 250 | MHz |
| 增益率 | 50 至 400 | - |
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