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FT-NIR / FT-IR
FTIR（傅里叶变换红外光谱仪）是一种红外光谱仪测量方法。
用红外光照射样品（固体、液体或气体），然后使用干涉仪干涉透射光或反射光，并通过傅里叶变换信号强度来获取光谱信息。
由于可以根据获得的光谱信息对物质进行定性、定量和识别，因此使用 FTIR 的分析仪和分光光度计被广泛应用于医疗、化学、环境和材料分析等各个领域。
根据所处理的红外光的波长范围，其有时被区分为 FT-NIR（近红外光）或 FT-IR（中红外光）。
滨松 FT-NIR/FT-IR 产品
| 波长 (μm) | FT-NIR | FT-IR | |||
|---|---|---|---|---|---|
| 1 | 2 | 5 | 10 | 15 | |
| 光谱仪 |
(1.1 ～ 2.5 μm) |
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| 红外探测器 |
(1 ～ 2.5 μm) |
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|
(1 ～ 3.8 μm) |
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|
(1 ～ 5.5 μm) |
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|
(1 ～ 11. μm) |
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|
(1 ～ 14.5 μm) |
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FTIR 引擎（用于 FT-NIR）
FTIR 引擎（FT-NIR 光谱仪）是一种紧凑型傅里叶变换红外光谱仪模块，将迈克尔逊光干涉仪和控制电路组合在一个手掌大小的外壳中。我们将独特的 MEMS 技术和安装技术应用于光干涉仪，在保留傅里叶变换型特点的同时，使 FTIR 引擎的外形更加紧凑。
特点
高检测性能
为了消除由小型化引起的入射光量的降低，我们使用滨松的原创 MEMS 技术开发了一种可动反射镜。该反射镜在光干涉仪内构成执行器，然后借此进行改进，以便高效利用反射光。此外，我们将可动反射镜和固定反射镜集成为 MEMS 芯片，从而使其结构紧凑，并将反射镜之间的相对角度误差减小至约 1/100。通过优化 MEMS 执行器的结构和驱动方法，消除运行期间的模糊问题，我们抑制了光干涉仪内部的红外光扩散，并减少了损耗。如此一来，我们实现了堪比传统固定式设备的检测性能。
高波长再现性
当被测量的光（入射光）被分束器分割，被可动反射镜和固定反射镜反射，然后再次结合时，就会发生光干涉。根据可动反射镜的位置变化的干涉光强度由光电检测器（InGaAs PIN 光电二极管）检测，然后对信号进行算术处理（傅里叶变换）以获得光谱。通过使用光电检测器（硅 PIN 光电二极管）和半导体激光器 (VCSEL) 测量干涉仪内部可动反射镜的位置，可以获得具有高波长再现性的光谱。
紧凑且高精度
图片：FTIR 引擎的光学系统
测量示例
1.1 μm 至 2.5 μm 的近红外区域在各个领域用于红外光谱分析，因为许多材料在此区域具有独特的吸收光谱。
使用 FTIR 引擎的红外光谱分析有两种类型：反射测量和透射测量。
反射测量（糖）
比较来自 FTIR 引擎和来自固定光谱仪的糖粉样品的反射测量结果，我们发现甚至可以使用 FTIR 引擎准确测量微小的峰型，和使用固定光谱仪获得的光谱相似。
透射率测量（酒精）
我们能够获得水和酒精饮料吸收波段的特性谱。此外，根据 2.3 μm 波段吸光度估算的酒精浓度结果，我们确认了饮料中所含成分的估算值和数值相匹配，并且可以进行高精度测量。
II 类超晶格红外探测器（用于 FT-IR）
FTIR 中使用的许多中红外光电检测器都含有 RoHS 指令限制的物质，因此需要开发替代产品。
作为可检测波长达 14.5 μm 的化合物光电半导体设备，我们成功量产了全球第一款不使用 RoHS 指令限制物质（汞和镉）的 II 型超晶格红外探测器。
还提供带有前置放大器的模块，只需连接直流电源即可操作。
特点
可检测范围达 14.5 μm
卓越的输出线性度
实现量产
与典型的光电半导体不同，该产品的主要特征是“超晶格”结构，其中厚度仅为几纳米的 InAs 和 GaSb 化合物薄膜交替堆叠至 2000 多层。通过采用滨松独特的化合物半导体技术，精准控制在基板上堆叠 InAs 和 GaSb 的数量和时间，并通过优化温度、压力和其他条件以打造制造方法，实现了量产。
相关文档
介绍了各种测量示例“FTIR 引擎测量示例”
发布了滨松中国和外部专家测量的各种数据，包括透射测量和漫反射测量的原理。
产品系列文档“气体测量设备”
介绍了每种光学气体测量方法的合适光源、探测器和应用。
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