滨松拥有一系列 PHEMOS-X 发射显微镜和 iPHEMOS-MPX 倒置发射显微镜。这些系统可执行各种类型的电气故障分析，例如光发射分析、热发射分析、IR-OBIRCH 分析等。汽车芯片制造商能够缩小可疑缺陷部分的范围，以进行物理故障分析。该工作流程可确保半导体器件的稳健性。
iPHEMOS-MPX 倒置光发射显微镜是一种半导体故障分析系统，旨在通过检测半导体器件缺陷发射的光和热来识别故障位置。iPHEMOS-MPX 利用其倒置型设计，可实现半导体器件的背面分析，同时允许对 300 mm 晶圆进行多针指针探测 (multi-pin needle probing)。
用于从背面分析半导体晶圆的倒置光发射显微镜。直接对接专用探针器可将多针指针连接到 300 mm 晶圆上，并且通过附加选件，可通过操作器执行封装分析和针-指针 (pin-needle) 连接。
PHEMOS-X 是一款高分辨率微光显微镜，它能通过探测半导体器件缺陷导致发射的微弱光和热来定位失效位置。PHEMOS-X 支持从探针插座板到晶圆探针的各种任务和用途。
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