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PHEMOS-X 微光显微镜
C15765-01
特点
可安装两个超高灵敏度相机
通过涵盖不同的发射分析和热分析检测波长范围，从而可以轻松选择与样品和故障模式相匹配的分析技术。
可安装多达 5 个 OBIRCH、DALS 和 EOP 光源
专为先进设备设计的高精度载物台
光学载物台的工作范围
| X | ±20 mm |
|---|---|
| Y | ±20 mm |
| Z | +80 mm |
* 由于使用了探针台，加上样品台或 NanoLens 安装的干涉，工作范围可能窄于这些值。
基本显示功能
叠加显示/对比度增强功能
* 实际显示功能可能因软件版本、环境等因素而异。
PHEMOS-X 将微光图像叠加在高分辨率图案图像上，以快速定位缺陷点。
对比度增强功能使图像更清晰、更细腻。
显示功能
- 注释：评论、箭头和其他指示符可以显示在图像上所需的任何位置。
- 刻度显示：可以在图像上分段显示刻度宽度。
- 网格显示：可以在图像上显示垂直和水平网格线。
- 缩略图显示：图像可以存储为缩略图并进行调用，并且可以显示图像信息，例如载物台坐标。
- 拆分屏幕显示：可以在 6 窗口屏幕中一次显示图案图像、微光图像、叠加图像和参考图像。
LSI 测试仪连接示例
随着设备变得日益复杂，在设备运行时日益需要连接 LSI 测试仪进行分析，以便找到特定部位发生的故障。可以通过短电缆以及专为使用 PHEMOS-X 光学器件进行分析而设计的探头卡适配器，将 LSI 测试仪连接到 PHEMOS-X。
详细参数
| 尺寸/重量 | 主机：1656 mm (W) ×2000 mm (H) ×1247 mm (D)，约 1640 kg 操作台*1：1000 mm (W) × 700 mm (H) × 800 mm (D)，约 39.2 kg / 1480 mm (W) × 700 mm (H) × 800 mm (D)，约 48.6 kg |
|---|---|
| 线路电压 | 单相 200 V ～ 240 V |
| 功耗 | 约 3300 VA |
| 真空度 | 至少 80 kPa |
| 压缩空气*2 | 0.6 MPa ～ 0.7 MPa |
*1：选项
*2：包括调节器
相关信息
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