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TD Imaging | 失效分析系统
半导体应用实验室是一个旨在与客户共同创造的协作空间。 其提供了实际设备的操作演示，包括由我们的专家工程师进行的现场演示和购买前样品测试。
什么是 TD Imaging？
TD Imaging 是一项适用于识别逻辑半导体等复杂结构半导体中缺陷的新技术，它可以通过内部金属层精确定位缺陷。
特点
专利激光扫描技术
将信噪比 (S/N) 提高了 38 倍。滨松拥有基于激光热反射技术的专利，在热成像方面表现出卓越的精度和可靠性，并持续引领该领域的创新。
可选最佳波长
与 1300 nm 相比，670 nm 光源使 Cu 和 Al 等金属的 S/N 提高了 4 倍。
更高灵敏度
灵活的扫描速度、扫描区域和积分时间，可在 90 秒内完成数据采集，提供了比 LIT (Lock-in Thermography) 更高的信噪比。
TD Imaging 和 LIT 的对比
推荐的工作流组合
在使用 LIT 技术检测到大范围信号后，通过使用 TD Imaging (ThermoDynamic Imaging) 将范围缩小到 2 μm，同时利用图像处理来提高 PFA 命中率。这使得缺陷识别更加准确，提高了分析效率。
相关产品
Dual PHEMOS-X 专为先进的 3D 非透明器件所设计，在这些器件中，可能需要在晶圆或芯片级的两侧（顶部和底部）同时进行光学故障分析。
半导体应用实验室
半导体应用实验室（位于静冈县滨松市常光工厂）是一个旨在与客户共同创造的实验室。我们的设备可解决半导体故障分析和晶圆测试等各种问题。
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