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TD Imaging | 失效分析系统
什么是TD Imaging？
TD Imaging是一项适用于识别逻辑半导体等复杂结构半导体中缺陷的新技术，它可用来精确定位内部含有金属结构的芯片中的缺陷。
功能特点
专利激光扫描技术
将信噪比(S/N)提高了38倍。滨松拥有基于激光热反射技术的专利，在热成像方面表现出卓越的精度和可靠性，并持续引领该领域的创新。
可选最佳波长
与 1300 nm相比，670 nm光源使Cu和Al等金属的S/N提高了 4 倍。
更高灵敏度
灵活的扫描速度、扫描区域和积分时间，可在90秒内完成数据采集，提供了比LIT（Lock-in Thermography）更高的信噪比。
TD Imaging和LIT的对比
推荐的工作流组合
在使用LIT技术检测到大范围信号后，通过使用TD Imaging(ThermoDynamic Imaging)将范围缩小到 2 μm，同时利用图像处理来提高PFA命中率。这使得缺陷识别更加准确，提高了分析效率。
可用产品
Dual PHEMOS-X 专为先进的 3D 非透明器件所设计，在这些器件中，可能需要在晶圆或芯片级的两侧（顶部和底部）同时进行光学故障分析。
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