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Dual PHEMOS®-X 微光显微镜
C16506-01
可针对一个单元进行两侧故障分析
Dual PHEMOS-X 专为先进的 3D 非透明器件所设计，在这些器件中，可能需要在晶圆或芯片级的两侧（顶部和底部）同时进行光学故障分析。
PHEMOS是日本滨松光子学株式会社，及其全球子公司（中国大陆、欧洲联盟、日本、韩国、台湾、美国）注册使用的商标。
特点
两侧分析
无需将设备移至另一系统/仪器，即可轻松切换顶部故障分析与底部故障分析。
专为先进设备设计的高精度载物台
光学载物台的工作范围
| X | Y | Z | |
|---|---|---|---|
| 顶部 | 40 mm | 40 mm | 80 毫米 |
| 底部 | 60 mm | 60 mm | 20 mm |
* 由于使用了探针台，加上样品台或 NanoLens 安装的干涉，工作范围可能窄于这些值。
样品载物台（半自动探针台 MPd-1000X C16688-01）
主要功能
• XY 载物台控制
• Z、Theta 控制
| X | 300 mm |
|---|---|
| Y | 300 mm |
| Z | 22.5 mm |
| θ | +/- 5° |
• 晶圆映射功能
• 对齐功能
基本显示功能
叠加显示/对比度增强功能
* 实际显示功能可能因软件版本、环境等因素而异。
Dual PHEMOS-X 将微光图像叠加在高分辨率图案图像上，以快速定位缺陷点。
对比度增强功能使图像更清晰、更细腻。
显示功能
- 注释：评论、箭头和其他指示符可以显示在图像上所需的任何位置。
- 刻度显示：可以在图像上分段显示刻度宽度。
- 网格显示：可以在图像上显示垂直和水平网格线。
- 缩略图显示：图像可以缩略图的形式进行存储和调用。可以显示载物台坐标等图像信息。
- 拆分屏幕显示：可以在 6 窗口屏幕中一次显示图案图像、微光图像、叠加图像和参考图像。
详细参数
| 尺寸/重量 | 主机：1900 mm (W) × 2200 mm (H) × 1350 mm (D)，约 2335 kg 系统机架：1060 毫米（宽）× 1841.5 毫米（高）× 715 毫米（深），约 370 kg 探针台机架：800 mm (W) × 1800 mm (H) × 650 mm (D)，约 360 kg |
|---|---|
| 线路电压 | 单相 200 V ～ AC 240 V 50 Hz/60 Hz |
| 用电功耗 | 约 3300 VA（系统机架）/ 约 4400 VA（探针台机架） |
| 真空度 | ー40 kPa ～ ー80 kPa |
| 压缩空气 | 0.5 MPa ～ 0.7 MPa |
*1 包括调节器
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