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Optical MicroGauge膜厚测量系统
C11011系列
Optical MicroGauge膜厚测量系统C11011是一种利用激光干涉法的薄膜膜厚测量系统。可在60 Hz时进行高速测量，因此也可用于工厂内的线阵测量。与可选的映射系统结合使用，以便进行原型厚度分布测量。它可用于从监控制造过程到质量控制的各种用途。
| 型号 |
C11011-02 |
C11011-02W |
C11011-22 |
C11011-22W |
|---|---|---|---|---|
| 可测量的薄膜厚度范围（玻璃）*1 | 25 μm至2.2 mm | 25 μm至2.9 mm | 25 μm至2.2 mm | 25 μm至2.9 mm |
| 可测量的薄膜厚度范围（硅）*2 | 10 μm至0.9 mm | 10 μm至1.2 mm | 10 μm至0.9 mm | 10 μm至1.2 mm |
| 测量重现性（玻璃）*3 | 250 nm | 250 nm | 250 nm | 250 nm |
| 测量重现性（硅）*4 | 100 nm | 100 nm | 100 nm | 100 nm |
| 测量精度（硅）*5 | ±0.5 μm（≦500 μm）, ±0.1 %（>500 μm） | ±0.5 μm（≦500 μm）, ±0.1 %（>500 μm） | ±0.5 μm（≦500 μm）, ±0.1 %（>500 μm） | ±0.5 μm（≦500 μm）, ±0.1 %（>500 μm） |
| 光源 | 红外LD （1300 nm) | 红外LD (1300 nm) | 红外LD （1300 nm) | 红外LD (1300 nm) |
| 光斑尺寸 | 约Φ60 μm | 约Φ60 μm | 约Φ60 μm | 约Φ60 μm |
| 工作距离 *6 | 155 mm | 155 mm | 155 mm | 155 mm |
| 可测量层数 | 最多1层 | 最多1层 | 最多10层 | 最多10层 |
| 分析 | 峰值检测 | 峰值检测 | 峰值检测 | 峰值检测 |
| 测量时间 | 16.7 ms/point | 22.2 ms/point | 16.7 ms/point | 22.2 ms/point |
| 外部控制功能 | RS-232C，PIPE | RS-232C，PIPE | RS-232C，以太网 | RS-232C，以太网 |
| 接口 | USB 2.0（主机 - 计算机） | USB 2.0（主机 - 计算机） | USB 2.0（主机 - 计算机） | USB 2.0（主机 - 计算机） |
| 电源 | AC100 V至AC240 V，50 Hz/60 Hz | AC100 V至AC240 V，50 Hz/60 Hz | AC100 V至AC240 V，50 Hz/60 Hz | AC100 V至AC240 V，50 Hz/60 Hz |
| 功耗 | 约50 VA | 约50 VA | 约 50 VA | 约 50 VA |
| 光纤连接器形状 | FC | FC | FC | FC |
*1：当以玻璃折射率1.5进行转换时。
*2：当以硅折射率3.67进行转换时。
*3：测量玻璃膜时的标准偏差（容差）。
*4：测量硅时的标准偏差（容差）。
*5：测量硅时。
*6：提供工作距离为1000 mm的可选型号。
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