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HyperGauge 膜厚测量系统
C17319-11
短短 5 秒内即可完成直径达 300 mm 晶圆的厚度分布测量
HyperGauge 膜厚测量系统 C17319-11 采用光谱干涉法进行精准的膜厚测定。采用 λ-Capture 技术，无需光谱仪即可利用高灵敏度相机检测波长偏移，短短 5 秒内即可完成直径达 300 mm 的整个晶圆的薄膜厚度测量。
面内厚度分布快照
与点传感器系统相比，HyperGauge 膜厚测量系统 C17319-11 可显著提升厚度分布采集速度。该系统结合了高空间分辨率和高重复性测量，达到了检查裸晶圆和图案化晶圆所需的精度要求。
短短 5 秒即可完成厚度分布采集
该系统采用滨松专有的波长检测技术 λ-Capture，并结合高灵敏度相机，实现了基于区域的厚度测量。短短 5 秒内即可完成直径达 300 mm 晶圆的面内厚度分布采集。由于整个晶圆表面可一次性成像，与点传感器系统相比，该系统简化了测量点选择和对准流程。
借助快速均匀性测量提高生产力
在半导体制造过程中，由于受腔室内管脚温度等因素的影响，晶圆薄膜厚度可能发生变化。这些厚度非均匀性会对产品质量产生负面影响，因此必须在各过程步骤之间实现薄膜厚度的均衡。使用点传感器系统时，受时间限制，测量点数量有限，因而难以全面获取面内厚度分布情况。通过采用基于区域的测量方法，我们的系统在短短 5 秒内即可完成从约 75 万个点对面内厚度分布的测量。这样就能缩短处理时间，从而提高生产力，并通过全面的厚度分布分析提高良品率。快速的面内均匀性测量可显著提高半导体制造的生产力和质量。
腔室所致厚度变化
半导体制程中的厚度检查
测量示例
图样评估（厚度分布轮廓比较）
我们获取了图样间的厚度分布情况，并比较了采用点传感器法的 Optical NanoGauge 与采用基于区域法的 HyperGauge 的厚度分布轮廓。结果表明，HyperGauge 测量薄膜厚度的精度可与点传感器法相媲美。
大范围非均匀性：SiO2 300 nm
小范围非均匀性：SiO2 500 nm
超薄薄膜：SiO2 10 nm
图样评估：SiOx2 300 nm
通过水和玻璃：SiO2 500 nm
测量原理
HyperGauge 采用光谱干涉法。此方法通过分析薄膜样品的反射来测量薄膜厚度。干涉光谱随薄膜厚度变化而发生偏移。
用于高速波长测量的 λ-Capture 技术
λ-Capture 是一种专有波长检测技术，无需使用光谱仪即可进行波长测量。对整个晶圆进行波长测量时，使用常规光谱仪进行点测量或使用成像光谱仪进行线测量都需要花费大量的时间。
该技术利用两台高灵敏度相机对整个区域内的波长进行测量，从而实现对整个晶圆表面的高速光谱测量。通过将这项技术整合到 HyperGauge 中，短短 5 秒内即可完成对整个晶圆的面内薄膜厚度分布测量。
详细参数
| 产品编号 | C17319-11 |
|---|---|
| 测量薄膜厚度范围 | 10 nm 至 1000 nm |
| 测量精度 | 薄膜厚度 10 nm 至 100 nm：±1 nm 薄膜厚度 100 nm 至 1000 nm：±1% |
| 测量可再现性 | 薄膜厚度 10 nm 至 100 nm（96 次积分）：0.1 nm 薄膜厚度 100 nm 至 1000 nm（96 次积分）：±0.1% |
| 稳定性 | 温度依赖性：环境温度变化 +20°C 至 +30°C：±1% 高度依赖性（5 mm 高度变化）：±1% 长期稳定性（启动后 1 小时）：±0.5% |
| 视野 | 整个 300 mm 晶圆表面 |
| 空间分辨率 | 0.3 mm/像素 |
| 工作距离 | 场镜底部至样品表面距离：30 nm 至 100 mm |
| 分析 | λ-Capture 分析 |
| 测量时间（包括分析时间）*1 | 5 秒 |
| 外部通信接口 | Camera Link，RS-232C |
| 电源电压 | 直流 24 V |
| 用电功耗 | 大约 40 W |
*1 取决于测量和分析条件。
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