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用途：干洗 | 扁平准分子灯
该准分子灯光源通过采用扁平灯和 RF（射频）放电实现均匀的辐照和稳定的输出，几乎没有闪烁。
与传统的电晕放电和等离子法相比，它无损害且不会产生灰尘。
真空紫外光辐照可破坏有机材料的化学键，使其氧化挥发，从而去除表面的有机污染物。准分子灯光源发射的 172 nm 波长的真空紫外光对氧具有高吸收系数，产生高浓度的活性氧和臭氧以及断裂有机材料分子键的优异能力。鉴于该法清洗质量高，故具有产量高等诸多优点，且对那些无法用湿法清洗的材料或对热敏感的材料尤其有效。
应用示例
- 晶圆和玻璃基板的清洗
- 去除抗蚀剂残基、粘合剂残基、有机薄膜和油污
激光器用镀金振镜的清洗
清洗前
清洗后
去除晶圆上的空间液体残基
清洗前
清洗后
去除丙酮清洗剂残基
清洗前
清洗后
原理（代表性例子）
- Confirmation
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