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使用 PL 测量方法检测缺陷 | 微型 LED PL 检查系统
以高度灵敏检测 AOI 无法检测的缺陷。
通常，划痕、灰尘和配线故障可以通过自动光学检查 (AOI) 等外观检查来检测，但是 AOI 无法充分检测晶体中的裂纹和 LED 芯片中的缺陷。
滨松光子学专注于研究可通过 PL 型成像测量的“发光波长” 和“发光强度”，并开发了一种技术来检测微型 LED 半导体晶圆的晶体内部缺陷和杂质。
由于 MiNYⓇ PL 支持使用高灵敏度图像检测缺陷，因此可以清晰地观察微观缺陷。
将这种使用 PL 测量的内部检查与外观检查相结合，可实现更精确的检查。
将发光波长转换为映射图像，并以 ± 0.5 nm 的高精度检测波长变化
据说，微型 LED 发光波长的细微变化直接影响显示器的色调和辉度。微型 LED 的发光波长中 2 nm 的波长变化可被人眼识别为色调不均匀。发光波长的变化是生产色调和辉度均匀的微型 LED 的关键参数。
MiNY PL 能够以高达 ±0.5 的精度检测波长变化，并将芯片之间的发光波长差异转换为映射图像，从而将晶圆内发光波长的变化差异可视化为色调不均匀。这样就能更加精确而高效地测定晶圆质量。
发射光谱也可以使用可选的光谱分析模块来测量。
可根据发光波长、PL 强度和外观检查进行详细分析的软件。
MiNY PL 软件采集并显示外观和 PL 图像。它还具有提高分析精度的性能，例如各种支持性分析。
提高分析精度的特点
- 支持各种芯片设计
- 兼容 RGB 的测量设置
- 质量判断指导功能
- Confirmation
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