通过在空间上控制相位,可以控制光的衍射和干涉现象,并形成具有高光利用率的任意光强度分布。可以计算利用 LCOS-SLM 为这种任意光强度分布生成的相位分布。这称为计算机生成的全息图 (CGH),可通过计算机轻松计算。与通过光透射率调节光强度的一般投影仪相比,使用 CGH 的全息波束形成技术是一种巧妙地使用光的干涉效应而不产生光损失的技术。该技术对于具有强入射光强度的激光加工尤其有效。在一般投影仪中,光被阻挡时通常会转化为热量,这可能会直接影响处理机器的使用寿命。在全息光束成形中,这种热转换效应很小,可以使用高强度光。此外,由于透镜收集的光可以分成多个光束,因此可以实现高精度和高通量处理,并且有望构建一个从本质上改变制造业生产率的系统。
利用高速相机捕获红色激光的位置,并在空间光调制器上显示基于位置信息计算的全息图,绿色激光生成的图案可以显示在红色激光上。
人们期望开发一种系统,可以通过提取特征量和应用反馈,在适当的方向和位置高速捕获激光,特别是当具有曲面的加工物体以各种方向流经生产线时。
将打标激光照射到装配线上的物体
Stealth Dicing ™ (隐形切割)工艺是使用脉冲激光器通过加工晶圆内部来进行高质量切割的切割方法。在半导体制造中,晶圆的尺寸已变大,但厚度变得非常薄。单个晶圆可以无损失切割出多少个器件,或者如何在不损坏切割过程的情况下切割高性能集成电路,最终产品越小,对这种方法的性能要求就越高。在此项技术中,需要将激光光束以高精度聚焦到晶圆内,以扩展裂纹。然而,由于硅作为一般晶圆材料具有很高的折射率,如果在聚焦过程中空气与硅材料发生接触,则激光聚焦特性会由于球面像差而劣化。因此,通过安装 LCOS-SLM,可以校正球面像差,即使晶圆材料改变也可以实现相同的校正。
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