高分辨率 X 射线成像系统
高分辨率 X 射线成像系统将可视化入射 X 射线束的成像单元与磷光体和照相机结合在一起。只需选择 X 射线成像系统主体、荧光屏*和光学系统*,即可轻松获取 X 射线图像。您可以从产品阵容中自由选择相机,并根据您的应用将光学系统和相机组合起来构建系统。此外,光学设计考虑了设备的耐用性和可维护性,使其适合使用同步辐射设施中使用的强 X 射线进行成像。
*选项
测试条件
方法 | X 射线形貌 |
---|---|
相机 | ORCAⓇ-Flash4.0 V3 |
样品 | SiC 单晶基板(晶体脱位) |
X 射线能量 | 9 keV |
像素尺寸 | 0.65 μm |
放大率 | × 10 |
曝光时间 | 10 s |
目标图像中的像素数 | 1970 像素 × 1970 像素 (1.28 毫米 × 1.28 毫米) |
荧光屏 | LuAG 10 μm |
数据由 Mie University 半导体和数字未来创新中心提供,Yongzhao YAO 博士
测试条件
方法 | X 光叠层成像 |
---|---|
相机 | ORCA-Fusion BT |
样品 | 牙签 |
曝光时间 | 10 ms/投影 |
投影数量 | 1800 |
X 射线能量 | 15 keV |
像素尺寸 | 0.65 μm |
数据由光子科学创新中心提供
可选择作为选件的直接接合型荧光屏是具有极高 X 射线耐久性的单晶荧光屏。它抑制 X 射线对荧光屏的破坏,并实现长期稳定的成像和测量。
即使同步辐射白色 X 射线长时间入射,也不会发生破坏。
测量条件
光束线 | SPring-8 BL28B2 |
---|---|
X 射线能量 | 白色 |
衰减器 | 空气 (9 m),铝 (0.034 mm),窗口(光束线侧 1 mm 厚 + 探测器侧 0.5 mm 厚) |
光束尺寸 | 3 mm × 3 mm |
探测器 | 粘合剂接合型:AA40 (f = 50 mm) + ORCA-Flash2.8 (f = 35 mm) 直接接合类型:AA40 (f = 50 mm) + ORCA-Flash4.0 (f = 50 mm) |
像素分辨率 | 粘合剂接合型:5.1 μm/像素,直接接合型:6.5 μm/像素 |
荧光屏 | LuAG(厚度:粘合剂接合型约为 20 μm,直接接合型约为 20 μm) |
数据由 JASRI(日本同步辐射研究所)工业应用事业部提供,Dr. Kentaro Kajiwara
即使接受大约 20 次具有高通量密度的 X 射线长时间入射,也不会发生破坏。
测量条件
光束线 | SPring-8 BL47XU |
---|---|
X 射线能量 | 8 KeV |
衰减器 | 无 |
通量密度 | 4.7 ×1013 光子/秒/平方毫米 |
光束尺寸 | 350 μm × 350 μm |
探测器 | AA50(物镜 10×/NA 0.3)+ C13949-50U |
像素分辨率 | 0.21 μm/像素 |
荧光屏 | LuAG(厚度:粘合剂接合型为 22.3 μm,直接接合型为 21.4 μm) |
数据由 JASRI(日本同步辐射研究所)提供,Dr. Kentaro Uesugi
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