实施膜厚测量系统存在一些挑战,例如系统设计复杂,以及安装和维护任务繁琐。这些挑战可能导致生产效率降低和成本增加。
解决这些问题的一种有效方法是,使用采用对角度变化和离焦不敏感的测量系统。滨松光子学株式会社在其膜厚测量系统中最大限度降低了角度和离焦依赖性,从而简化系统设计,并减少安装和维护工作量。
本页介绍了标准膜厚测量系统与滨松光子学株式会社开发的膜厚测量系统在角度和离焦依赖性方面的差异。
角度依赖性是指在薄膜厚度评估中,入射光相对于测量目标表面的角度变化对测量结果的影响。当入射角发生变化时,光的反射和传输特性也会发生变化,这会影响检测信号的强度和相位信息。因此,相同的薄膜厚度在不同的入射角下可能产生不同的测量结果。
滨松光子学株式会社的膜厚测量系统具有较低的角度依赖性,即使在轻微角度偏差的情况下也能保持测量精度。
Optical NanoGauge 在 0°至 5°的角度变化范围内可实现低至 0.39 nm (0.047%)的测量差异。
图 1. 角度差异对测量的影响
离焦依赖性是指光学系统的聚焦状况对膜厚测定结果的影响。当测量目标的表面偏离光学系统的焦点平面时,所获取的图像或信号的对比度和分辨率可能会下降,从而可能影响测量精度。在测量精细结构或极薄薄膜时,这种影响会变得尤为显著。
滨松光子学株式会社的膜厚测量系统并未采用基于透镜的聚焦光学元件,与标准薄膜厚度测量仪器相比,大大减少了高度偏差导致的测量结果差异。
Optical NanoGauge 在 ±3 nm 的离焦(高度位移)内可实现低于 0.1 nm 的测量差异。
图 2. 离焦差异对测量的影响
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