半导体晶圆研磨过程是积分电路 (IC) 和其他半导体器件制造中的一个关键步骤。该过程涉及去除半导体晶圆表面的多余材料,以达到所需的厚度、平整度和表面质量。
晶圆研磨是半导体制造中的一个关键过程,专门设计用于减薄半导体晶圆,以达到所需的厚度、平整度和表面质量。采用磨料砂轮仔细去除晶圆背面多余的材料,确保均匀且可控制的材料去除。精度至关重要,一些先进系统/仪器采用过程测量技术实时监测和调节晶圆厚度。研磨后,可能进行终抛光步骤,以提升晶圆表面光洁度,并消除研磨过程中引入的任何残留缺陷。晶圆研磨尤为重要,其精度在决定终半导体产品的整体质量、性能和可靠性方面发挥着基础性作用。
检查晶圆上的粒子、凹坑、凸起、划痕、污渍、污染物和其他可能导致故障的缺陷。使用扫描电子显微镜 (SEM) 复查缺陷。使用与紫外线、红外线、X 射线和电子光束等各种波长范围兼容的感光和发光器件,可实现对亚微米粒子和微缺陷的无损、非接触式检查。总体而言,裸晶圆检查在维持质量、优化过程和降低成本方面发挥着关键作用,可防止生产有缺陷的半导体器件并减少材料浪费。
光电倍增管广泛应用于半导体晶圆检查系统/仪器。在晶圆检查中,激光光束对晶圆进行扫描,由光电倍增管检测污垢或缺陷引起的散射光。
这些是全球仅有的采用以下方法的光源:在充满氙气的灯泡中,在放电电极之间用聚焦激光光束产生等离子体,以此维持发射。与传统的氙灯相比,这些光源在紫外区域提供更亮的强光,并具有寿命长、发射点小等特点。
光谱反射测量法在确保半导体晶圆研磨至所需厚度和质量方面发挥着关键作用,这对于积分电路和其他半导体器件的生产至关重要。该方法可进行实时测量和控制,帮助半导体制造商实现精准且一致的结果。
It looks like you're in the . If this is not your location, please select the correct region or country below.
You're headed to Hamamatsu Photonics website for (Chinese). If you want to view an other country's site, the optimized information will be provided by selecting options below.
In order to use this website comfortably, we use cookies. For cookie details please see our cookie policy.
This website or its third-party tools use cookies, which are necessary to its functioning and required to achieve the purposes illustrated in this cookie policy. By closing the cookie warning banner, scrolling the page, clicking a link or continuing to browse otherwise, you agree to the use of cookies.
Hamamatsu uses cookies in order to enhance your experience on our website and ensure that our website functions.
You can visit this page at any time to learn more about cookies, get the most up to date information on how we use cookies and manage your cookie settings. We will not use cookies for any purpose other than the ones stated, but please note that we reserve the right to update our cookies.
For modern websites to work according to visitor’s expectations, they need to collect certain basic information about visitors. To do this, a site will create small text files which are placed on visitor’s devices (computer or mobile) - these files are known as cookies when you access a website. Cookies are used in order to make websites function and work efficiently. Cookies are uniquely assigned to each visitor and can only be read by a web server in the domain that issued the cookie to the visitor. Cookies cannot be used to run programs or deliver viruses to a visitor’s device.
Cookies do various jobs which make the visitor’s experience of the internet much smoother and more interactive. For instance, cookies are used to remember the visitor’s preferences on sites they visit often, to remember language preference and to help navigate between pages more efficiently. Much, though not all, of the data collected is anonymous, though some of it is designed to detect browsing patterns and approximate geographical location to improve the visitor experience.
Certain type of cookies may require the data subject’s consent before storing them on the computer.
This website uses two types of cookies:
This website uses cookies for following purposes:
Cookies help us help you. Through the use of cookies, we learn what is important to our visitors and we develop and enhance website content and functionality to support your experience. Much of our website can be accessed if cookies are disabled, however certain website functions may not work. And, we believe your current and future visits will be enhanced if cookies are enabled.
There are two ways to manage cookie preferences.
If you don’t want to receive cookies, you can modify your browser so that it notifies you when cookies are sent to it or you can refuse cookies altogether. You can also delete cookies that have already been set.
If you wish to restrict or block web browser cookies which are set on your device then you can do this through your browser settings; the Help function within your browser should tell you how. Alternatively, you may wish to visit www.aboutcookies.org, which contains comprehensive information on how to do this on a wide variety of desktop browsers.
Occasionally, we may use internet tags (also known as action tags, single-pixel GIFs, clear GIFs, invisible GIFs and 1-by-1 GIFs) at this site and may deploy these tags/cookies through a third-party advertising partner or a web analytical service partner which may be located and store the respective information (including your IP-address) in a foreign country. These tags/cookies are placed on both online advertisements that bring users to this site and on different pages of this site. We use this technology to measure the visitors' responses to our sites and the effectiveness of our advertising campaigns (including how many times a page is opened and which information is consulted) as well as to evaluate your use of this website. The third-party partner or the web analytical service partner may be able to collect data about visitors to our and other sites because of these internet tags/cookies, may compose reports regarding the website’s activity for us and may provide further services which are related to the use of the website and the internet. They may provide such information to other parties if there is a legal requirement that they do so, or if they hire the other parties to process information on their behalf.
If you would like more information about web tags and cookies associated with on-line advertising or to opt-out of third-party collection of this information, please visit the Network Advertising Initiative website http://www.networkadvertising.org.
We use third-party cookies (such as Google Analytics) to track visitors on our website, to get reports about how visitors use the website and to inform, optimize and serve ads based on someone's past visits to our website.
You may opt-out of Google Analytics cookies by the websites provided by Google:
https://tools.google.com/dlpage/gaoptout?hl=en
As provided in this Privacy Policy (Article 5), you can learn more about opt-out cookies by the website provided by Network Advertising Initiative:
http://www.networkadvertising.org
We inform you that in such case you will not be able to wholly use all functions of our website.
Close