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溅射
该过程通过将惰性气体电离后的材料原子沉积到晶圆表面，形成薄膜。
溅射是半导体制造中的基本过程，是薄膜沉积的关键方法。在此技术中，靶材在真空环境中受到高能离子轰击，使原子或分子脱离并形成蒸汽。该蒸汽在附近的基板（常为半导体晶圆）上凝结，形成薄而均匀的涂层。该过程可精准控制薄膜厚度，并能沉积对积分电路及其他电子和光学组件制造至关重要的多种材料。溅射过程具有多功能性，具备卓越的台阶覆盖能力，且能沉积具有特定属性的材料，是形成先进半导体器件功能与性能所必需的薄膜层的关键步骤。
半导体制造中的常见过程步骤
粒子污染和表面缺陷检查
借助滨松先进的晶圆污染检查解决方案，确保半导体生产纯净无瑕。探索我们精心打造的精明技术，用于精准检测污染物，保护半导体晶圆免受杂质污染。了解滨松在晶圆检查领域的专业知识如何为半导体制造过程树立可靠性和质量标准。
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