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晶圆检查
该过程涉及晶圆上的异物和缺陷检查以及图案测量。
在半导体制造过程中进行的晶圆检查需要对半导体晶圆进行细致检查，以识别并处理缺陷或不规则之处。该过程对于确保终半导体器件的质量和可靠性至关重要。其采用光学显微镜和电子显微镜等多种检查技术，对晶圆表面进行细致检查，以发现粒子、划痕或图案偏移等瑕疵。
自动检查系统/仪器在加快检查过程和提高精度方面发挥着重要作用。此类系统/仪器利用先进的算法和图像处理技术快速分析大量晶圆。晶圆检查通常在半导体制造过程的多个阶段进行，包括光刻、蚀刻和沉积等关键步骤之后。在晶圆检查过程中尽早发现并解决缺陷，有助于优化半导体制造，确保生产出高质量、可靠的电子元件。
异物和缺陷检查
晶圆检查的关键在于识别并处理可能导致半导体器件故障的异物和缺陷。检查过程采用非破坏性和非接触式方法，利用先进技术检测晶圆表面微小的异物和微缺陷。随着半导体器件向更小、更精细、更高积分度的趋势发展，这种方法尤为重要。
随着对器件精度要求的不断提高，非接触式检查方法已成为必需。此类技术采用先进的光学和成像技术，无需与晶圆物理接触即可检测微观瑕疵。半导体制造商可通过采用无损检查策略，确保在保持晶圆完整性的同时，尽早识别并解决异物和缺陷问题。这种主动方法对于优化制造过程、提高良品率以及生产出质量更高、可靠性更强的半导体器件至关重要。
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光电倍增管广泛应用于半导体晶圆检查系统/仪器。在晶圆检查中，激光光束对晶圆进行扫描，由光电倍增管检测污垢或缺陷引起的散射光。
下列光电倍增管因其高量子效率、良好的均匀性和低尖峰噪声而被推荐。
这些是全球仅有的采用以下方法的光源：在充满氙气的灯泡中，在放电电极之间用聚焦激光光束产生等离子体，以此维持发射。与传统的氙灯相比，这些光源在紫外区域提供更亮的强光，并具有寿命长、发射点小等特点。
电子光束检测
在晶圆检查中，电子光束检测是指一种用于高精度检查半导体晶圆的精明技术。该方法利用电子光束进行检测，通过结合闪烁体和光电探测器来实现检测。此类组件的协同作用使得电子光束的相互作用能够转换为可检测信号。使用电子光束的一个显著优势是设备分辨率更高，能够识别晶圆表面更精细的细节和缺陷。
电子光束检测过程包括生成与晶圆相互作用的电子，产生信号，然后捕获并分析这些信号。随着半导体器件不断发展，变得更小且设计愈加复杂，该方法提供的分辨率水平特别有用。在晶圆检查中使用电子光束检测，有助于推动半导体制造的发展，通过确保对晶圆进行彻底检查以发现缺陷，终将提高所生产电子元件的整体质量和可靠性。
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半导体制造中的常见过程步骤
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